The VSP63 is based on a new, patented measurement principle. The well-proven Thyracont impulse Pirani sensor provides a larger measuring range with higher resolution. The advanced VSP63 uses an optimized temperature compensation. Accuracy and stability have been further improved.
| Sensor Type | Pirani |
| Sensor Material | W |
| Measuring Range | 750 torr – 0.1 mTorr |
| Output | 4-20 mA |
| Connector | M12 |
| Flange Type | KF16 |
