California Scientific, Inc. (logo)California Scientific, based in Sunnyvale, CA, was organized in 1993 as a provider of custom optoelectronic products and services and soon became a developer and manufacturer of optoelectronic test equipment with an emphasis on vertical cavity surface emitting laser device fabrication.

The VIXEL-320 Wet Oxidation system was developed in response to a need by VCSEL device developers for a single-wafer atmospheric pressure oxidation tool that is compatible with multi-wafer production oxidation tools in order to simplify process transfer. The VIXEL-320, while being relatively simple in concept, incorporates in-situ optical monitoring of oxide aperture formation and can be operated in either manual or automated mode. It will accommodate a single wafer up to 150mm (6”) diameter.

Unlike more complex (and very costly) vacuum-based oxidation systems, the VIXEL-320 is ideally designed and priced for both VCSEL developers and smaller device manufacturers.

Refer to VIXEL-320 specifications for further details. Contact us to discuss your specific requirements and a product proposal. UVT is an authorized distributor of CSI products in the United States and Canada.

Oxidation aperture in a VCSEL array with mesa isolation

Oxidation aperture in a VCSEL array with mesa isolation